Abstract: Accurate endpoint detection is critical in semiconductor plasma etching. Optical emission spectroscopy data contains information about the endpoint, but its analysis requires significant ...
The US federal government’s central energy information agency is planning to implement a mandatory nationwide survey of data centers focused on their energy use, according to a letter seen by WIRED.
Abstract: The trajectory planning for spacecraft formation reconfiguration (SFR) presents significant technical challenges due to its time-optimal performance index, highly nonlinear terminal ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results